Open access peer-reviewed Edited Volume

Microelectromechanical Systems (MEMS) - Innovation, Manufacturing Techniques and Applications

Microelectromechanical Systems (MEMS)
Microelectromechanical Systems (MEMS) Innovation, Manufacturing Techniques and Applications Edited by Zdravko Stanimirović and Ivanka Stanimirović

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Academic Editor

Zdravko Stanimirović
Zdravko Stanimirović

“Vinča” Institute of Nuclear Sciences – National Institute of the Republic of Serbia, University of Belgrade,
Serbia

Co-editor

Ivanka Stanimirović
Ivanka Stanimirović

“Vinča” Institute of Nuclear Sciences – National Institute of the Republic of Serbia, University of Belgrade,
Serbia

Published26 February 2025

Doi10.5772/intechopen.1004966

ISBN978-1-83634-331-8

Print ISBN978-1-83634-332-5

eBook (PDF) ISBN978-1-83634-333-2

Copyright year2025

Number of pages98

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Edited Volume and chapters are indexed in

  • Google Scholar
  • DOAB
  • Crossref
  • Dimension
  • OpenAIRE
  • AZ ebsco
  • Worldcat
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Table of Contents

Open access  chapters

5,970
2. Advanced MEMS Technologies

By Zdravko Stanimirović and Ivanka Stanimirović

79
39
4. Flexible MEMS Techniques for Multi-Physical Sensors

By Yongbiao Wan, Zhiguang Qiu, Lingfeng Kang, Zejia Deng and Junze Li

80

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